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at70a.txt Nzeyimana (1991) [94] P=26.7 kPa, ER=0.8, 50% Ar+CF4
at70b.txt Nzeyimana (1991) [94] P=26.7 kPa, ER=1, 50% Ar+CF4
at70c.txt Nzeyimana (1991) [94] P=26.7 kPa, ER=1.2, 50% Ar+CF4
at189.txt Lefebvre (1993) [71] P=26.7 kPa, ER=1, 50% Ar+CF3H
Edited Last: May 27, 2002